Laterally driven electrostatic actuators with extended travel range [6114-28]

Laterally driven electrostatic actuators with extended travel range [6114-28]

著者名:

Su, J ( Univ. of Notre Dame (USA) )
Yang, H ( Univ. of Notre Dame (USA) )
Porod, W ( Univ. of Notre Dame (USA) )
Fay, P ( Univ. of Notre Dame (USA) )
Bernstein, G H ( Univ. of Notre Dame (USA) )

掲載資料名:

MOEMS Display, Imaging, and Miniaturized Microsystems IV

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6114

発行年:

2006

開始ページ:

61140P

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461568 [0819461563]

言語:

英語

請求記号:

P63600/6114

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016148
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : MOEMS Display, Imaging, and Miniaturized Microsystems
回次:	2006 : 4th
会議開催地:	San Jose, CA, USA
会議開催年:	2006.01.25-2006.01.26

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