Experimental and theoretical investigation of contact resistance and reliability of lateral contact type ohmic MEMS relays (Invited Paper) [6111-18]

Experimental and theoretical investigation of contact resistance and reliability of lateral contact type ohmic MEMS relays (Invited Paper) [6111-18]

著者名:

Almeida, L. ( Auburn Univ. (USA) )
Ishikawa, K. ( Yokohama National Univ. (Japan) )
Yu, Q. ( Yokohama National Univ. (Japan) )
Jackson, R. ( Auburn Univ. (USA) )
Ramadoss, R. ( Auburn Univ. (USA) )

掲載資料名:

Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6111

発行年:

2006

開始ページ:

61110F

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461537 [0819461539]

言語:

英語

請求記号:

P63600/6111

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016145
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS
回次:	2006 : 5th
会議開催地:	San Jose, CA, USA
会議開催年:	2006.01.25-2006.01.26

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