Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment [6109-29]

Development of fabrication techniques for high-density integrated MIM capacitors in power conversion equipment [6109-29]

著者名:

Brunet, M. ( LAAS-CNRS (France) )
Dubreuil, P. ( LAAS-CNRS (France) )
Scheid, E. ( LAAS-CNRS (France) )
Sanchez, J.-L. ( LAAS-CNRS (France) )

掲載資料名:

Micromachining and Microfabrication Process Technology XI

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6109

発行年:

2006

開始ページ:

61090Q

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461513 [0819461512]

言語:

英語

請求記号:

P63600/6109

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016143
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining and Microfabrication Process Technology
回次:	2005 : 11th
会議開催地:	San Jose, CA, USA
会議開催年:	2005.01.25

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