Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining [6109-03]

Fabrication of three-dimensional near-IR photonic crystals using deep-UV contact photolithography and silicon micromachining [6109-03]

著者名:

Citla, B. S. ( Univ. of Delaware (USA) )
Venkataraman, S. ( Univ. of Delaware (USA) )
Murakowski, J. ( Univ. of Delaware (USA) )
Schneider, G. J. ( Univ. of Delaware (USA) )
Prather, D. W. ( Univ. of Delaware (USA) )

掲載資料名:

Micromachining and Microfabrication Process Technology XI

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6109

発行年:

2006

開始ページ:

610903

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461513 [0819461512]

言語:

英語

請求記号:

P63600/6109

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016143
シリーズID:	PA00000029
会議名:	Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components : Micromachining and Microfabrication Process Technology
回次:	2005 : 11th
会議開催地:	San Jose, CA, USA
会議開催年:	2005.01.25

類似資料:

1 国際会議録 Three-dimensional near-IR photonic crystals for optical interconnects using conventional silicon microfabrication techniques [6232-21] Citla B. S, Venkataraman S., Murakowski J., Shi S., Schneider G. J, Prather D. W SPIE - The International Society of Optical Engineering	7 国際会議録 Fabrication of three-dimensional photonic crystals using lithographic processes Prather, D.W., Peng, Y., Schneider, G.J., Murakowski, J. SPIE - The International Society of Optical Engineering
2 国際会議録 Fabrication of 3D silicon photonic crystal structures using conventional micromachining technology Venkataraman, S., Murakowski, J., Schneider, G.J., Prather, D.W. SPIE - The International Society of Optical Engineering	8 国際会議録 Fabrication of three-dimensional Yablonovite photonic crystals by multiple-exposure UV interference lithography Schneider, G.J., Wetzel, E.D., Murakowski, J.A., Prather, D.W. SPIE - The International Society of Optical Engineering
3 国際会議録 Investigation of the III-V oxidation process for the fabrication of sub-micron three dimensional photonic devices [6110-25] Swaminathan, K., Murakowski, J., Schuetz, C., Schneider, G. J., Citla, B. S., Prather, D. W. SPIE - The International Society of Optical Engineering	9 国際会議録 Fabrication of photonic crystals using chemical lithography P. Yao, M. Murakowski, L. Prather, G. J. Schneider, J. Murakowski, D. W. Prather SPIE - The International Society of Optical Engineering
4 国際会議録 Dispersion Engineering of Three-Dimensional Silicon Photonic Crystals: Fabrication and Applications Venkataraman, Sriram, Schneider, Garrett, Prather, Dennis W., Murakowski, Janusz, Shi, Shouyan Materials Research Society	10 国際会議録 Design, simulation, and fabrication of 3D self-collimation photonic crystals (Invited Paper) Prather, D. W., Venkataraman, S., Shi, S., Schneider, G., Murakowski, J. SPIE - The International Society of Optical Engineering
5 国際会議録 Self-collimation in three-dimensional photonic crystals Prather, D.W., Shi, S., Venkataraman, S., Lu, Z., Murakowski, J., Schneider, G.J. SPIE - The International Society of Optical Engineering	11 国際会議録 Three-dimensional photolithography based on image reversal Yao, P., Schneider, G., Miao, B., Murakowski, J., Prather, D. SPIE - The International Society of Optical Engineering
6 国際会議録 Fabrication of three-dimensional photonic crystals with multilayer photolithography Yao, P., Schneider, G.J., Miao, B., Prather, D.W., Wetzel, E.D., O'Brien, D.J. SPIE - The International Society of Optical Engineering	12 国際会議録 Novel fabrication methods for 2D photonic crystals in silicon slab waveguides (Invited Paper) Prather, D.W., Murakowski, J.A., Venkataraman, S., Peng, Y., Balcha, A., Dillon, T., Pustai, D. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12