Excimer laser material processing: state-of-the-art and new approaches in microsystem technology (Invited Paper) [6107-16]

Excimer laser material processing: state-of-the-art and new approaches in microsystem technology (Invited Paper) [6107-16]

著者名:

Pfleging, W. ( Forschungszentrum Karlsruhe GmbH (Germany) )
Przybylski, M. ( ATL Lasertechnik GmbH (Germany) )
Bruckner, H. J. ( Univ. of Applied Sciences (Germany) )

掲載資料名:

Laser-based Micropackaging

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6107

発行年:

2006

開始ページ:

61070G

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461490 [0819461490]

言語:

英語

請求記号:

P63600/6107

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016141
シリーズID:	PA00000029
会議名:	SPIE LASE : Laser-based micropackaging
回次:	2006
会議開催地:	San Jose, CA, USA
会議開催年:	2006.01.25-2006.01.26

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