High repetition rate excimer laser [6106A-58]

High repetition rate excimer laser [6106A-58]

著者名:

Esser, H. G. ( Coherent Lambda Physik GmbH (Germany) )
Schillinger, H ( Coherent TuiLaser AG (Germany) )

掲載資料名:

Photon Processing in Microelectronics and Photonics V

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

6106

発行年:

2006

開始ページ:

61061I

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819461483 [0819461482]

言語:

英語

請求記号:

P63600/6106

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00016140
シリーズID:	PA00000029
会議名:	SPIE LASE : Photon processing in microelectronics and photonics
回次:	2006 : 5th
会議開催地:	San Jose, CA, USA
会議開催年:	2006.01.23-2006.01.26

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