High-sensitivity 2.5-um pixel CMOS image sensor realized using Cu interconnect layers [6068-11]
- 著者名:
Tatani, K. ( Sony Corp. (Japan) ) Enomoto, Y. ( Sony Corp. (Japan) ) Yamamoto, A. ( Sony Corp. (Japan) ) Goto, T. ( Sony Corp. (Japan) ) Abe, H. ( Sony Corp. (Japan) ) Hirayama, T. ( Sony Corp. (Japan) ) - 掲載資料名:
- Sensors, Cameras, and Systems for Scientific/Industrial Applications VII
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6068
- 発行年:
- 2006
- 開始ページ:
- 606809
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819461087 [0819461083]
- 言語:
- 英語
- 請求記号:
- P63600/6068
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
国際会議録
Performance of immersion lithography for 45-nm-node CMOS and ultra-high density SRAM with 0.25um2
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |