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Phase shift algorithm for white-light interferometry insensitive to a linear error in phase shift increment (Invited Paper) [6048-07]

著者名:
Adachi M. ( Kanazawa Univ. (Japan) )  
掲載資料名:
Optomechatronic actuators and manipulation : 5-7 December 2005, Sapporo, Japan
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6048
発行年:
2005
開始ページ:
604806
終了ページ:
604806
総ページ数:
1
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460844 [0819460842]
言語:
英語
請求記号:
P63600/6048
資料種別:
国際会議録

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