Optical scanning devices based on PZT thiv¥ck films formed by aerosol deposition method [6037-80]
- 著者名:
- Park J. H
- Akedo J.
- Levedev M.
- Sato H. ( National Institute of Advanced Industrial Science and Technology (Japan) )
- 掲載資料名:
- Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6037
- 発行年:
- 2006
- 開始ページ:
- 60371S
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460684 [0819460680]
- 言語:
- 英語
- 請求記号:
- P63600/6037
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Thick PZT film/stainless steel actuator fabricated by aerosol deposition method: fatigue property
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
Materials Research Society |
SPIE - The International Society of Optical Engineering |
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Materials Research Society |