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Micropattering research of silicon-based ferroelectric PMNT thins films [6037-50]

著者名:
掲載資料名:
Device and process technologies for microelectronics, MEMS, and photonics IV : 12-14 December 2005, Brisbane, Australia
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6037
発行年:
2006
開始ページ:
603718
終了ページ:
603718
総ページ数:
1
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460684 [0819460680]
言語:
英語
請求記号:
P63600/6037
資料種別:
国際会議録

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