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Comparitive study of surface acoutic wave based hydrogen sensors with: InOx/SiNx/36° YX LITAO3 structure [6035-43]

著者名:
Fechete A. C
Wlodarski W.
Kalantar-zadeh K.
Holland A. S ( RMIT Univ. (Australia) )
Antosziewski J. ( The Univ. Of Western Australia) )
Kaciulis S.
Pandolfi L. ( ISMN, CNR 9Italy) )
さらに 2 件
掲載資料名:
Microelectronics: Design, Technology, and Packaging II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6035
発行年:
2006
開始ページ:
603517
終了ページ:
603517
総ページ数:
1
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460660 [0819460664]
言語:
英語
請求記号:
P63600/6035
資料種別:
国際会議録

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