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Fabrication of integrated optic fiber tip for micron CMMs touch trigger probe application [6036-05]

著者名:
ji H.
Hsu Y.
Chua J.
Kong L.X
Wedding A. B
She M
Lin G. C. I ( Univ. of South Australia (Australia) )
Fan K. C ( National Taiwan Univ. (Taiwan) )
さらに 3 件
掲載資料名:
Microelectronics: Design, Technology, and Packaging II
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6035
発行年:
2006
開始ページ:
603505
終了ページ:
603505
総ページ数:
1
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460660 [0819460664]
言語:
英語
請求記号:
P63600/6035
資料種別:
国際会議録

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