Negative chemical amplification process simulation in integrated circuits and microelectomechanical systems fabrication [6032-15]
- 著者名:
- 掲載資料名:
- ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 6032
- 発行年:
- 2006
- 開始ページ:
- 60320F
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460639 [081946063X]
- 言語:
- 英語
- 請求記号:
- P63600/6032
- 資料種別:
- 国際会議録
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12
国際会議録
Fabrication and analysis of optoelectronic integrated circuits with one selective area growth
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