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MEMS-based thin palladium membrane microreactors [6032-07]

著者名:
Ye, -Y. S. ( National Institute of Advance Industrial Science and Technology (Japan) )
Tanaka, S.
Esashi, S. ( Tohoku Univ. (Japan) )
Hamakawa, S.
Hanaoka, T.
Mizukami, F. ( National Institute of Advanced Industrial Science and Technology (Japan) )
さらに 1 件
掲載資料名:
ICO20 : MEMS, MOEMS, and NEMS : 21-26 August, 2005, Changchun, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6032
発行年:
2006
開始ページ:
603207
終了ページ:
603207
総ページ数:
1
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460639 [081946063X]
言語:
英語
請求記号:
P63600/6032
資料種別:
国際会議録

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