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Uniformity of DLC deposited by pulsed vacuum arc ion source [6029-20]

著者名:
掲載資料名:
ICO20 : materials and nanostructures : 21-26 August, 2005, Changchun, China
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
6029
発行年:
2006
開始ページ:
60290K
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460608 [0819460605]
言語:
英語
請求記号:
P63600/6029
資料種別:
国際会議録

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