The importance of being homogeneous: on the influence of illumination inhomogeneity on AIMS images [5992-99]
- 著者名:
- Durr, A. C.
- Bubke, K.
- Sczyrba, M. ( Advanced Mask Technology Ctr. (Germany) )
- Angonin, S. ( Univ. de Technologie Belfort-Montbeliard (France) )
- 掲載資料名:
- 25th Annual BACUS Symposium on Photomask Technology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5992
- 発行年:
- 2005
- パート:
- 2
- 開始ページ:
- 59922Y
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819460141 [0819460141]
- 言語:
- 英語
- 請求記号:
- P63600/5992
- 資料種別:
- 国際会議録
類似資料:
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
国際会議録
Automated evaluation of AIMS images: an approach to minimize evaluation variability [6283-44]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |