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First 65-nm tape-out using inverse lithography technology (ILT) [5992-67]

著者名:
Hung, C. -Y.
Zhang, B.
Tang, D.
Guo, E. ( Semiconductor International Manufacturing Corp. (China) )
Pang, L.
Liu, Y.
Moore, A.
Wang, K. ( Luminescent Technologies Inc. (USA) )
さらに 3 件
掲載資料名:
25th Annual BACUS Symposium on Photomask Technology
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5992
発行年:
2005
パート:
1
開始ページ:
59921U
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819460141 [0819460141]
言語:
英語
請求記号:
P63600/5992
資料種別:
国際会議録

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