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Interferogram analysis for flatness metrology [5972-48]

著者名:
Nascov, V.
Timcu, A.
Apostol, D.
Garoi, F.
Damian, V.
Iordache, I.
Logofatu, P.C. ( National Institute for Laser, Plasma and Radiation Physics (Romania) )
さらに 2 件
掲載資料名:
Advanced topics in optoelectronics, microelectronics, and nanotechnologies II : 24-26 November, 2004, Bucharest, Romania
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5972
発行年:
2005
開始ページ:
59721C
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459916 [0819459917]
言語:
英語
請求記号:
P63600/5972
資料種別:
国際会議録

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