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Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry [5965-66]

著者名:
Antos, R. ( Shizouka Univ. (Japan) )
Ohlidal, I. ( Masaryk Univ. (Czech Republic) )
Mistrik, J.
Yamaguchi, T. ( Shizouka Univ. (Japan) )
Visnovsky, S. ( Charles Univ. (Czech Republic) )
Yamaguchi, S.
Horie, M. ( Dainippon Screen Manufacturing Co., Ltd .(Japan) )
さらに 2 件
掲載資料名:
Optical fabrication, testing and metrology II : 13-15 September 2005, Jena, Germany
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5965
発行年:
2005
開始ページ:
59652B
出版情報:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459831 [0819459836]
言語:
英語
請求記号:
P63600/5965
資料種別:
国際会議録

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