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Potentialigies of optical profilometer MicroProf FRT for surface quality measurement [5945-36]

著者名:
  • R-ssler, T. ( Palacky Univ. (Czech Republic); )
  • Hrabovsk-, M. ( Joijt Lab. Of Optics of Palacky Univ. and Institute of Physics (Czech Republic); )
  • Pluha-ek, f. ( Palack- Univ. Czech Republic) )
掲載資料名:
14th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5945
発行年:
2005
開始ページ:
594511
終了ページ:
594511
総ページ数:
1
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459510 [0819459518]
言語:
英語
請求記号:
P63600/5945
資料種別:
国際会議録

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