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X-ray beam metrology and X-ray optic alignment by Hartmann wavefront sensing [5921-10]

著者名:
Mercere, P. ( Synchroton SOLEIL (France) )
Bucourt, S. ( Imagine Optic (France) )
Cauchon, G. ( Synchroton SOLEIL (France) )
Douillet, D. ( Lab d’Optique Appliquee ENSTA, Ecole Polytechnique (France) )
Dovillaire, G. ( Imagine Optic (France) )
Goldberg, K. A. ( Lawrence Berkeley National Lab. (USA) )
Idir, M. ( Synchroton SOLEIL (France) )
Levecq, X. ( Imagin Optic (France) )
Moreno, T. ( Synchroton SOLEIL (France) )
Naulleau, P. P.
Rekawa, S. ( Lawrence Berkeley National Lab. (USA) )
Zeitoun, O. ( Lab d’Optique Appliquee ENSTA, Ecole Polytechnique (France) )
さらに 7 件
掲載資料名:
Advances in metrology for x-ray and EUV optics : 2-3 August 2005, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5921
発行年:
2005
開始ページ:
592109
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459268 [0819459267]
言語:
英語
請求記号:
P63600/5921
資料種別:
国際会議録

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