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Nano-positioning control of 5-DOF manipulator for alignment of condenser in soft x-ray microscopy system [5918-50]

著者名:
Kim, G. K.
Kim, J. H.
Min, J. H.
Kim, K. W.
Kwon, Y. M. ( Wonkwang Univ,. (South Korea); )
Min. J. Y. ( LISTEM Co. (South Korea) )
Yoon, K. H. ( Wonkwang Unit (South Korea) )
さらに 2 件
掲載資料名:
Laser-generated, synchrotron, and other laboratory X-ray and EUV sources, optics, and applications II : 2-4 August 2005, San Diego, California, USA
シリーズ名:
Proceedings of SPIE - the International Society for Optical Engineering
シリーズ巻号:
5918
発行年:
2005
開始ページ:
59181A
出版情報:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819459237 [0819459232]
言語:
英語
請求記号:
P63600/5918
資料種別:
国際会議録

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