Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity [5879-34]

Phase-shifting laser diode interferometry with equal phase steps using a Fabry-Perot cavity [5879-34]

著者名:

Bitou, Y.
Inaba, H.
Hong, F. -L.
Takatsuji, T.
Onae, A. ( National Metrology Institute of Japan (Japan) )

掲載資料名:

Recent Developments in Traceable Dimensional Measurements III

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5879

発行年:

2005

開始ページ:

58790Y

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458841 [0819458848]

言語:

英語

請求記号:

P63600/5879

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015918
シリーズID:	PA00000029
会議名:	Optics & Photonics : Recent Developments in Traceable Dimensional Measurements
回次:	2005 : 3rd
会議開催地:	San Diego, CA, USA
会議開催年:	2005.07.31-2005.08.01

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