Improvement in total measurement uncertainty for gate CD control [5878-24]
- 著者名:
Bunday, B. D. ( ISMI (USA); ) Sirjgabu, O. Wen, Y. Paranipe, A. Terbeek, P. ( Therma-Wave, Inc. (USA) ) Allgair, J. Peterson, A., ( ISMI (USA) ) - 掲載資料名:
- Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5878
- 発行年:
- 2005
- 開始ページ:
- 58780M
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458834 [081945883X]
- 言語:
- 英語
- 請求記号:
- P63600/5878
- 資料種別:
- 国際会議録
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Quantitative profile-shape measurement study on a CD-SEM with application to etch-bias control
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