Multifunctional interferometric platform for static and dynamic MEMS measurement [5878-07]
- 著者名:
- Kacperski, J.
- Kujawinska, M. ( Warsaw Univ. of Technology (Poland) )
- 掲載資料名:
- Advanced characterization techniques for optics, semiconductors, and nanotechnologies II : 2-4 August, 2005, San Diego, California, USA
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5878
- 発行年:
- 2005
- 開始ページ:
- 587807
- 終了ページ:
- 587807
- 総ページ数:
- 1
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458834 [081945883X]
- 言語:
- 英語
- 請求記号:
- P63600/5878
- 資料種別:
- 国際会議録
類似資料:
1
国際会議録
Phase only SLM as a reference element in Twyman-Green laser interferometer for MEMS measurement
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |