Influence of the real-life structures in optical metrology using spectroscopic scatterometry analysis [5858-12]
- 著者名:
- Quintanilha, R.
- Hazart, J.
- Thony, P. ( CEA/LETI (France) )
- Henry, D. ( STMicroelectronics (France) )
- 掲載資料名:
- Nano- and Micro-Metrology
- シリーズ名:
- Proceedings of SPIE - the International Society for Optical Engineering
- シリーズ巻号:
- 5858
- 発行年:
- 2005
- 開始ページ:
- 58580C
- 出版情報:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819458582 [0819458589]
- 言語:
- 英語
- 請求記号:
- P63600/5858
- 資料種別:
- 国際会議録
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