High accuracy optoelectronic control system for near field characterization of millimeter long wave guiding structures [5858-06]

High accuracy optoelectronic control system for near field characterization of millimeter long wave guiding structures [5858-06]

著者名:

Chassagne, L.

Topcu, S.

Alayli, Y. ( Lab. d'Instrumentation et de Relations Individu Systeme-CNRS, Univ. de Versailles Saint-Quentin (France) )

Juncar, P. ( Bureau National de Metrologie (France) )

Royer, P. ( Lab. de Nanotechnologie et d’Instrumentation Optique, CNRS, UTT (France) )

さらに 4 件

掲載資料名:

Nano- and Micro-Metrology

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5858

発行年:

2005

開始ページ:

585806

終了ページ:

585806

総ページ数:

1

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458582 [0819458589]

言語:

英語

請求記号:

P63600/5858

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015897
シリーズID:	PA00000029
会議名:	Optical Metrology : Nano- and Micro-Metrology
回次:	2005
会議開催地:	Munich, Germany
会議開催年:	2005.06.16-2005.06.17

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