Micro-optics metrology using advanced interferometry [5856-36]

Micro-optics metrology using advanced interferometry [5856-36]

著者名:

Reichelt, S.
Bieber, A.
Aatz, B.
Zappe, H. ( IMTEK, Univ. of Freiburg (Germany) )

掲載資料名:

Optical Measurement Systems for Industrial Inspection IV

シリーズ名:

Proceedings of SPIE - the International Society for Optical Engineering

シリーズ巻号:

5856

発行年:

2005

パート:

1

開始ページ:

437

終了ページ:

446

総ページ数:

10

出版情報:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819458568 [0819458562]

言語:

英語

請求記号:

P63600/5856

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015895
シリーズID:	PA00000029
会議名:	Optical Metrology : Optical Measurement Systems for Industrial Inspection
回次:	2005 : 4th
会議開催地:	Munich, Germany
会議開催年:	2005.06.13-2005.06.17

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