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Structure, Composition and Order at Interfaces of Crystalline Oxides and Other High-K Materials on Silicon

著者名:
Gustafsson, T
Garfunkel, E
Goncharova, L
Starodub, D.
Barnes, R.
Dalponte, M
Bersuker, G
Foran, B
Lysaght,P
Schlom,D.G
さらに 5 件
掲載資料名:
Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices
シリーズ名:
NATO science series. Series 2, Mathematics, physics and chemistry
シリーズ巻号:
220
発行年:
2006
開始ページ:
349
終了ページ:
361
総ページ数:
13
出版情報:
Dordrecht: Springer
ISBN:
9781402043659 [1402043651]
言語:
英語
請求記号:
N17050/220
資料種別:
国際会議録

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