Transient Charging Effects and Its Implications to The Reliablility of High-k Dielectrics
- 著者名:
Lee, B. H Choi, R Harris, R Krishan, S. A Young, C. D Sim, J. Bersuker, G - 掲載資料名:
- Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices
- シリーズ名:
- NATO science series. Series 2, Mathematics, physics and chemistry
- シリーズ巻号:
- 220
- 発行年:
- 2006
- 開始ページ:
- 161
- 終了ページ:
- 175
- 総ページ数:
- 15
- 出版情報:
- Dordrecht: Springer
- ISBN:
- 9781402043659 [1402043651]
- 言語:
- 英語
- 請求記号:
- N17050/220
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Springer |
Electrochemical Society |
Electrochemical Society |
5
国際会議録
Electrical Characterization Methodologies for the Assessment of High-κ Gate Dielectric Stacks
Electrochemical Society |
Electrochemical Society |
6
国際会議録
Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |