SNOM Investigation of Surface Morphology Changes during Cr/Au Contact Fabrication on Single-Crystal CVD Diamond

SNOM Investigation of Surface Morphology Changes during Cr/Au Contact Fabrication on Single-Crystal CVD Diamond

著者名:

Doneddu, D.

掲載資料名:

Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005

シリーズ名:

Materials science forum

シリーズ巻号:

527-529

発行年:

2006

パート:

2

開始ページ:

1587

終了ページ:

1590

総ページ数:

4

出版情報:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494255 [0878494251]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015830
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials
回次:	2005
会議開催地:	Pittsburgh, Pennsylvania, USA
会議開催年:	2005.09.18-2005.09.23

類似資料:

1 国際会議録 Development of Low Resistance Al/Ti Stacked Metal Contacts to p-Type 4H-SiC M.R. Jennings, A. Perez-Tomas, D. Walker, L. Zhu, P.A. Losee, W. Huang, S. Balachandran, O.J. Guy, J.A. Covington, T.P. … Trans Tech Publications	7 国際会議録 Ellipsometric and XPS Studies of 4H-SiC/SiO2 Interfaces, and Sacrificial Oxide Stripped 4H-SiC Surfaces Guy, O.J., Chen, L., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T., Brieva, A., Hayton, D.J. Trans Tech Publications
2 国際会議録 Comparison of Different Surface Pre-Treatments to n-Type 4H-SiC and their Effect on the Specific Contact Resistance of Ni Ohmic Contacts Pope, G., Guy, O., Mawby, P.A. Trans Tech Publications	8 国際会議録 Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC Chen, L., Guy, O.J., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T., Brieva, A., Hayton, D.J. Trans Tech Publications
3 国際会議録 The Formation of Low Resistance Ohmic Contacts to 4H-SiC, Circumventing the Need for Post Annealing, Studied by Specific Contact Resistance Measurements and … Guy, O.J., Pope, G., Blackwood, I., Teng, K.S., Lee, W.Y., Wilks, S.P., Mawby, P.A. Trans Tech Publications	9 国際会議録 A UHV Study of Ni/SiC Schottky Barrier and Ohmic Contact Formation Kestle, A., Wilks, S. P., Dunstan, P. R., Pritchard, M., Pope, G., Koh, A., Mawby, P. A. Trans Tech Publications
4 国際会議録 Structural Properties of 3C-SiC Layers Grown on Si Substrates by Electron Cyclotron Resonance CVD Technique Giorgis, F., Chiodoni, A., Cicero, G., Ferrero, S., Mandracci, P., Pirri, C.F., Barucca, G., Calcagno, L., Foti, G., … Materials Research Society	10 国際会議録 Kinetics and Morphology of Homoepitaxial CVD Growth on Diamond (100) and (111) Rawles, R. E., Morris, W. G., D'Evelyn, M. P. MRS - Materials Research Society
5 国際会議録 4H-SiC Schottky Barrier Diodes Using Mo-, Ti- and Ni-Based Contacts D. Perrone, M. Naretto, S. Ferrero, L. Scaltrito, C.F. Pirri Trans Tech Publications	11 国際会議録 Demonstrating the Instability of SiC Ohmic Contacts and Drain Terminal Metallization Schemes Aged at 300 °C D.P. Hamilton, S.A. Hindmarsh, F. Li, M.R. Jennings, S.A.O. Russell, R.A. McMahon, P.A. Mawby Trans Tech Publications
6 国際会議録 Metal Contacts to Boron-Doped Diamond M. Lodzinski, O.J. Guy, A. Castaing, S. Batcup, S.P. Wilks Trans Tech Publications	12 国際会議録 Defect Influence on the Electrical Properties of 4H-SiC Schottky Diodes Scaltrito, L., Celasco, E., Porro, S., Ferrero, S., Giorgis, F., Pirri, C.F., Perrone, D., Meotto, U., Mandracci, P., … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12