Processing of Poly-SiC Substrates with Large Grains for Wafer-Bonding
- 著者名:
Chichignoud, G. Auvray, L. Blanquet, E. Anikin, M. Pernot, E. Bluet, J.M. Chaudouet, P. Mermoux, M. Moisson, C. Letertre, F. Pons, M. Madar, R. - 掲載資料名:
- Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005
- シリーズ名:
- Materials science forum
- シリーズ巻号:
- 527-529
- 発行年:
- 2006
- パート:
- 1
- 開始ページ:
- 71
- 終了ページ:
- 74
- 総ページ数:
- 4
- 出版情報:
- Stafa-Zuerich: Trans Tech Publications
- ISSN:
- 02555476
- ISBN:
- 9780878494255 [0878494251]
- 言語:
- 英語
- 請求記号:
- M23650
- 資料種別:
- 国際会議録
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12
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Investigation into the Film Growth of AIN on SiC by Low Pressure Chemical Vapour Deposition
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