The Spatial Distribution of Defects and Its Dependence on Seed Polarity and Off-Orientation during Growth of 4H-SiC Single Crystals

The Spatial Distribution of Defects and Its Dependence on Seed Polarity and Off-Orientation during Growth of 4H-SiC Single Crystals

著者名:

掲載資料名:

Silicon carbide and related materials - 2005 : proceedings of the International Conference on Silicon Carbide and Related Materials - 2005 : Pittsburgh, Pennsylvania, USA : September 18-23 2005

シリーズ名:

Materials science forum

シリーズ巻号:

527-529

発行年:

2006

パート:

1

開始ページ:

9

終了ページ:

14

総ページ数:

6

出版情報:

Stafa-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878494255 [0878494251]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015830
シリーズID:	PA00000012
会議名:	International Conference on Silicon Carbide and Related Materials
回次:	2005
会議開催地:	Pittsburgh, Pennsylvania, USA
会議開催年:	2005.09.18-2005.09.23

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2 国際会議録 Source Material Related Distribution of Defects in 6H-SiC Single Crystals Rost, H.-J, Siche, D., Dolle, J., Schulz, D., Wollweber, J. Trans Tech Publications	8 国際会議録 Properties of Nitrogen-Doped 4H-SiC Single Crystals Grown by Physical Vapor Transport Rost, H.-J., Irmscher, K., Doerschel, J., Siche, D., Schulz, D., Wollweber, J. Trans Tech Publications
3 国際会議録 Model for Macroscopic Slits in 6H- and 4H-SiC Single Crystals Wollweber, J., Rost, H.-J., Schulz, D., Siche, D. Trans Tech Publications	9 国際会議録 Macrodefect Generation in SiC Single Crystals Caused by Polytype Changes Rost, H.-J., Doerschel, J., Schulz, D., Siche, D., Wollweber, J. Trans Tech Publications
4 国際会議録 Model for Macroscopic Slits in 6H- and 4H-SiC Single Crystals Wollweber, J., Rost, H.-J., Schulz, D., Siche, D. Trans Tech Publications	10 国際会議録 Macrodefect Generation in SiC Single Crystals Caused by Polytype Changes Rost, H.-J., Doerschel, J., Schulz, D., Siche, D., Wollweber, J. Trans Tech Publications
5 国際会議録 Growth Related Distribution of Secondary Phase Inclusions in 6H-SiC Single Crystals Rost, H.-J., Dolle, J., Doerschel, J., Siche, D., Schulz, D., Wollweber, J. Trans Tech Publications	11 国際会議録 Study of Nitrogen Incorporation in 6H-SiC Single Crystals Grown by PVT Schulz, D., Irmscher, K., Dolle, J., Eiserbeck, W., Muller, T., Rost, H. -J., Siche, D., Wagner, G., Wollweber, J. Trans Tech Publications
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