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Spectroscopic Ellipsometry as a Tool for On-Line Monitoring and Control of Surface Treatment Processes

著者名:
Eitzinger, C.
Fikar, J.
Forsich, C.
Humlicek, J.
Kruger, A.
Kullmer, R.
Laimer, J.
Lingenhole, E.
Lingenhole, K.
Muhlberger, M.
Muller, T.
Stori, H.
Wielsch, U.
さらに 8 件
掲載資料名:
Recent developments in advanced materials and processes : selected papers presented at the 7th Conference of the Yugoslav Materials Research Society, held in Herceg Novi, Serbia and Montenegro, September 12-16, 2005
シリーズ名:
Materials science forum
シリーズ巻号:
518
発行年:
2006
開始ページ:
423
終了ページ:
430
総ページ数:
8
出版情報:
Uetikon-Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878494057 [0878494057]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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