Micro-Anode Guided Electroplating (MAGE) Control System

Micro-Anode Guided Electroplating (MAGE) Control System

著者名:

掲載資料名:

Progress on advanced manufacture for micro/nano technology 2005 : proceedings of the 2005 International Conference on Advanced Manufacture Taipei, Taiwan, R.O.C. November 28th-December 2nd, 2005

シリーズ名:

Materials science forum

シリーズ巻号:

505-507

発行年:

2006

パート:

1

開始ページ:

115

終了ページ:

120

総ページ数:

6

出版情報:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499908 [0878499903]

言語:

英語

請求記号:

M23650

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015816
シリーズID:	PA00000012
会議名:	International Conference on Advanced Manufacture
回次:	2005
会議開催地:	Taipei, Taiwan, R.O.C.
会議開催年:	2005.11.28-2005.12.02

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