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Preparation of Super-Hard Nanocomposite Films by ICP Assisted Magnetron Sputtering

著者名:
掲載資料名:
New frontiers of processing and engineering in advanced materials : proceedings of the International Conference on New Frontiers of Process Scinence and Engineering in Advanced Materials : The 14th Iketani Conference, November, 24-26, 2004, held in Kyoto, Japan
シリーズ名:
Materials science forum
シリーズ巻号:
502
発行年:
2005
開始ページ:
297
終了ページ:
302
総ページ数:
6
出版情報:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499809 [0878499806]
言語:
英語
請求記号:
M23650
資料種別:
国際会議録

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