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Applications of TiN Thin Films in Si Device Technology

著者名:
掲載資料名:
Thin films and interfaces : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
10
発行年:
1982
開始ページ:
409
終了ページ:
418
総ページ数:
10
出版情報:
New York: North-Holland
ISSN:
02729172
ISBN:
9780444007742 [0444007741]
言語:
英語
請求記号:
M23500/10
資料種別:
国際会議録

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