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LASER DEHYDROGENATION OF PECVD AMORPHOUS SILICON

著者名:
Mei, P.
Boyce, J.B.
Hack, M.
Lujan, R.A.
Johnson, R.I.
Anderson, G.B.
Fork, D.K.
Ready, S.E.
Smith, D.L.
さらに 4 件
掲載資料名:
Amorphous silicon technology, 1993 : Symposium held April 13-16, San Francisco, California, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
297
発行年:
1993
開始ページ:
151
終了ページ:
158
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991934 [155899193X]
言語:
英語
請求記号:
M23500/297
資料種別:
国際会議録

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