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NUCLEATION AND GROWTH OF CVD POLYCRYSTALLINE Si3N4 FILMS AT LOW TEMPERATURES

著者名:
掲載資料名:
Silicon nitride ceramics : scientific and technological advances : symposium held November 30-December 3,1992, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
287
発行年:
1993
開始ページ:
315
終了ページ:
322
総ページ数:
8
出版情報:
Pittsburgh: Materials Research Society
ISSN:
02729172
ISBN:
9781558991828 [1558991824]
言語:
英語
請求記号:
M23500/287
資料種別:
国際会議録

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