SILICON-NITRIDE FOR AMORPHOUS SILICON THIN-FILM TRANSISTORS

SILICON-NITRIDE FOR AMORPHOUS SILICON THIN-FILM TRANSISTORS

著者名:

掲載資料名:

Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

284

発行年:

1993

開始ページ:

395

終了ページ:

400

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991798 [1558991794]

言語:

英語

請求記号:

M23500/284

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015768
シリーズID:	PA00000011
会議名:	Symposium on amorphous insulating thin films
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.12.01-1992.12.04

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1 国際会議録 AMORPHOUS SILICON THIN-FILM TRANSISTORS MODIFIED BY DOPING AND PLASMA TREATMENT OF THE NITRIDE Nickel, N., Saleh, R., Fuhs, W., Mell, H. Materials Research Society	7 国際会議録 HYDROGENATION EFFECT OF AMORPHOUS SILICON THIN FILM TRANSISTORS BY ATMOSPHERIC PRESSURE CVD Ahn, B.C., Kim, J.H., Kim, D.G., Moon, B.Y., Kim, K.N., Lee, C.W., Jang, J. Materials Research Society
2 国際会議録 AMORPHOUS SILICON THIN-FILM TRANSISTORS WITH NON-UNIFORM DISTRIBUTION OF GAP STATES Saleh, R., Nickel, N., Fuhs, W., Mell, H. Materials Research Society	8 国際会議録 Defect And Tail States In Microcrystalline Silicon Investigated By Pulsed ESR Fuhs, W., Kanschat, P., Lips, K., Mell, H. Materials Research Society
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