HYDROGEN IN RF REACTIVE MAGNETRON SPUTTER SILICON NITRIDE FILMS

HYDROGEN IN RF REACTIVE MAGNETRON SPUTTER SILICON NITRIDE FILMS

著者名:

Lin, Chi-Hsien

掲載資料名:

Amorphous insulating thin films : symposium held December 1-4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

284

発行年:

1993

開始ページ:

21

終了ページ:

26

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991798 [1558991794]

言語:

英語

請求記号:

M23500/284

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015768
シリーズID:	PA00000011
会議名:	Symposium on amorphous insulating thin films
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.12.01-1992.12.04

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2 国際会議録 EFFECTS OF SUBSTRATE PRETREATMENTS ON GROWTH OF POLYCRYSTALLINE DIAMOND THIN FILMS ON Si (100) SUBSTRATES Lai, C., Wachtman Jr., J.B., Sigel, Jr., G.H., Lu, P., Cosandey, F.C., Rudd, G., Oliver, J.L., Garofalini, S.H. Materials Research Society	8 国際会議録 COMPOSITION AND STRUCTURE CHARACTERIZATION OF WNx FILMS PRODUCED BY RF REACTIVE SPUTTERING Lin, Dongliang (Lin, T. L.), Yan, Benda, Yu, Weili Materials Research Society
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4 国際会議録 PROPERTIES OF ELECTROLYTE AND ELECTRODE FILMS PREPARED BY RF AND DC MAGNETRON SPUTTERING Bates, J.B., Dudney, N.J., Chu, Y.T., Mazumdar, P. Materials Research Society	10 国際会議録 Influence of rf power on carbon nitride films prepared by rf magnetron sputtering Jiang,L., Fitzgerald,A.G., Rose,M.J. SPIE-The International Society for Optical Engineering
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