Blank Cover Image

MODELING OF BORON DIFFUSION IN POLYSILICON-ON-SILICON LAYERS

著者名:
掲載資料名:
Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
283
発行年:
1993
開始ページ:
653
終了ページ:
658
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991781 [1558991786]
言語:
英語
請求記号:
M23500/283
資料種別:
国際会議録

類似資料:

1 国際会議録 DIFFUSION OF AS AND B IN POLYSILICON/SINGLE CRYSTAL SILICON SYSTEMS

Park, K., Batra, S., Banerjee, S., Lux, G., Manukonda, R.

Materials Research Society
7 国際会議録 Ab-Initio Study of Boron Diffusion Retardation in Si1-xGex

Yonghyun Kim, Taras A. Kirichenko, Sanjay K. Banerjee, Gyeong S. Hwang

Materials Research Society
2 国際会議録 CONTROL OF POLYSILICON EMITTER BIPOLAR TRANSISTOR CHARACTERISTICS BY RAPID THERMAL OR FURNACE ANNEAL OF THE POLYSILICON/SILICON INTERFACE

Bhattacharya, S., Lobo, M., Jung, L., Banerjee, S., Reuss, R., Batra, S., Park, K., Hu, G.

Materials Research Society
8 国際会議録 Analysis and modeling of submicron drain-offset polysilicon thin film transistors (TFTs)

J. Damiano, Jr., L. Jung, S.K. Banerjee, S. Batra

Society of Photo-optical Instrumentation Engineers
3 国際会議録 SECONDARY GRAIN GROWTH IN HEAVILY DOPED POLYSILICON DURING RAPID THERMAL ANNEALING

Batra, S., Park, K., Lobo, M., Banerjee, S.

Materials Research Society
9 国際会議録 EFFECTS OF ARSENIC SEGREGATION AND ELECTRON TRAPPING ON THE CAPACITANCE-VOLTAGE BEHAVIOR OF POLYSILICON AND POLYCIDE GATES

Lin, J., Batra, S., Park, K., Banerjee, S., Sun, S., Yeargain, J., Lux, G.

Materials Research Society
4 国際会議録 LATERAL UNIFORMITY OF ULTRA-SHALLOW JUNCTIONS FORMED BY RAPID THERMAL ANNEALING IN POLYSILICON-ON-SILICON SYSTEMS

Batra, S., Park, K., Banerjee, S., Smith, T., Mulvaney, B.

Materials Research Society
10 国際会議録 *MODELLING DIFFUSION IN AND FROM POLYSILICON LAYERS

Hill, C., Jones, S. K.

Materials Research Society
5 国際会議録 COMPARISON OF AMORPHOUS AND POLYCRYSTALLINE SILICON FILMS AS A SOLID DIFFUSION SOURCE FOR ADVANCED VLSI PROCESSES

Park, K., Batra, S., Banerjee, S., Lux, G.

Materials Research Society
11 国際会議録 A Leakage Current Model for Sub-Micron Lightly-Doped Drain-Offset Polysilicon TFTs

Jung, L., Damiano, J., Jr., Batra, S., Manning, M., Banerjee, S.K.

Electrochemical Society
6 国際会議録 COMPARATIVE STUDIES OF FURNACE AND RAPID THERMAL PASSIVATION FOR ACCUMULATION AND INVERSION MODE POLYSILICON-ON-OXIDE MOSFETS

Batra, S., Park, K., Banerjee, S., Sundaresan, R.

Materials Research Society
12 国際会議録 Study of Polysilicon TFTs for High Density SRAM Applications

Zaman, R.J., Batra, S., Manning, M., Banerjee, S.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12