GROWTH OF POLYCRYSTALLINE SILICON FILMS AT LOW TEMPERATURE BY REMOTE PLASMA CVD

GROWTH OF POLYCRYSTALLINE SILICON FILMS AT LOW TEMPERATURE BY REMOTE PLASMA CVD

著者名:

掲載資料名:

Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

283

発行年:

1993

開始ページ:

635

終了ページ:

640

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991781 [1558991786]

言語:

英語

請求記号:

M23500/283

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015767
シリーズID:	PA00000011
会議名:	Symposium on microcrystalline semiconductors
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.11.30-1992.12.04

類似資料:

1 国際会議録 MICROCRYSTAL Si FILMS PREPARED BY REMOTE PLASMA CVD Kim, Sung Chul, Hwang, Jung Tae, Lee, Seung Kyu, Jung, Chang Young, Soe, Sung Moo, Koh, Sung Ok, Chung, Kwan Soo, Jang, … Materials Research Society	7 国際会議録 Effects of Annealing Atmosphere on the Characteristics and Optical Properties of SiON Films Prepared Plasma Enhanced Chemical Vapor Deposition Yun, Ki-Jun, Jung, Dong-Ryeol, Hong, Sung-Kil, Moon, Jong-Ha, Kim, Jin-Hyeok Materials Research Society
2 国際会議録 HYDROGEN RADICAL ANNEALING EFFECT ON THE GROWTH OF MICROCRYSTALLINE SILICON Jun, Jung Mok, Park, Kyu Chang, Kim, Sung Ki, Lee, Kyung Ha, Chu, Mi Kyung, Han, Min Koo, Lee, Young Hee, Jang, Jin Materials Research Society	8 国際会議録 Self-Aligned Thin Film Transistor Fabrication With an Ultra Low Temperature Polycrystalline Silicon Process on a Benzocyclobutene Planarized Stainless Steel … Jaehyun Moon, Dong-Jin Park, Choong-Heui Chung, Yong-Hae Kim, Sun Jin Yun, Jung Wook Lim, Jin Ho Lee Materials Research Society
3 国際会議録 Deposition of Diamond-Like Carbon Films by PECVD Park, Kyu. Chang, Chun, Soo. Chul, Song, Kyo. Jun, Park, Min, Oh, Myung Hwan, Choi, Seong. Soo, Park, Jung. Hae, Yang, … Materials Research Society	9 国際会議録 Polycrystalline Silicon On Glass By Field Enhanced Crystallization of Amorphous Silicon* Jang, Jin, Cho, Kyu Sik, Kim, Kyung Ho, Park, Seong Jin Electrochemical Society
4 国際会議録 A Model for the Frequency Dependence of Charge Pumping Current in Polycrystalline Silicon Thin Film Transistor Lee, Ga-Won, Lee, Jung-Yeal, Choi, Deuk-Sung, Hur, Sung-Hoi, Kim, Choong-Ki, Han, Chul-Hi MRS - Materials Research Society	10 国際会議録 Low Temperature Deposition of TaCN Films Using Pentakis(Diethylamido)Tantalum Jun, Gyu-Chang, Cho, Sung-Lae, Kim, Ki-Bum, Shin, Hyun-Koock, Kim, Do-Heyoung MRS - Materials Research Society
5 国際会議録 Characteristics of Inter Poly Dielectric (IPD) Prepared by Plasma Oxidation Treatment of LP-CVD SiO₂ Film Jung-hwan Kim, Yong-Seok Kim, Byong-Hyun Jang, Hyun Namkoong, Woo-Sung Lee, Hun-Hyoung Leam, Seok-Woo Nam, Chang-Jin … Materials Research Society	11 国際会議録 Effects of ECR N2O-Plasma Nitridation on Thermal Oxide Characteristics Lee, Jin-Woo, Lee, Jung-Yeal, Choi, Deuk-Sung, Hur, Sung-Hoi, Kim, Choong-Ki, Han, Chul-Hi MRS - Materials Research Society
6 国際会議録 HYDROGENATED SILICON FILMS PREPATED BY REMOTE PLASMA CVD Kim, S. C, Lee, S. K., Soe, S. M., Koh, S. O., Ihm, S. S., Jun, J. M., Kim, T. G., Chung, M. H., Lee, K. H., Song, H. … Materials Research Society	12 国際会議録 Cu Films on Si(100) by Partially Ionized Beam Deposition Koh, Seok-Keun, Kim, Ki-Hwan, Han, Sung, Jang, Hong Gui, Jung, Hyung-Jin MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12