A NEW THIN FILM GROWTH/REGROWTH PROCESS DESIGN AND EXPERIMENTAL COMPARISONS WITH MOLECULAR DYNAMIC ANALYSES
- 著者名:
Okada, Takako K. Kambayashi, Shigeru Yabuki, Moto Tsunashima, Yoshitaka Mikata, Yuichi Onga, Shinji - 掲載資料名:
- Microcrystalline semiconductors : materials science & devices : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 283
- 発行年:
- 1993
- 開始ページ:
- 615
- 終了ページ:
- 622
- 総ページ数:
- 8
- 出版情報:
- Pittsburgh, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991781 [1558991786]
- 言語:
- 英語
- 請求記号:
- M23500/283
- 資料種別:
- 国際会議録
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