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TRI-LAYER LIFT-OFF METALLIZATION PROCESS USING LOW TEMPERATURE DEPOSITED SiNx

著者名:
Lothian, J.R.
Ren, F.
Pearton, S.J.
Chakrabarti, U.K.
Abernathy, C.R.
Katz, A.
さらに 1 件
掲載資料名:
Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
282
発行年:
1993
開始ページ:
259
終了ページ:
266
総ページ数:
8
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991774 [1558991778]
言語:
英語
請求記号:
M23500/282
資料種別:
国際会議録

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