INVESTIGATION OF TITANIUM SILICON AND GERMANIUM REACTION

INVESTIGATION OF TITANIUM SILICON AND GERMANIUM REACTION

著者名:

掲載資料名:

Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

280

発行年:

1993

開始ページ:

585

終了ページ:

588

総ページ数:

4

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991750 [1558991751]

言語:

英語

請求記号:

M23500/280

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015764
シリーズID:	PA00000011
会議名:	Symposium on evolution of surface and thin film microstructure
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.11.30-1992.12.04

類似資料:

1 国際会議録 Titanium Germanosilicide Phase Formation During the Ti-Si1-xGex Solid Phase Reactions Aldrich, D. B., Chen, Y. L., Sayers, D. E., Nemanich, R. J. MRS - Materials Research Society	7 国際会議録 Characterization of Zirconium Germanosilicide Formed by Solid State Reaction of Zr with Si1-xGex Alloys Wang, Z., Aldrich, D. B., Goeller, P., Nemanich, R. J., Sayers, D. E. MRS - Materials Research Society
2 国際会議録 X-RAY ABSORPTION STUDIES OF TITANIUM SILICIDE FORMATION AT THE INTERFACE OF Ti DEPOSITED ON Si Aldrich, D.B., Fiordalice, R.W., Jeon, H., Islam, Q., Nemanich, R.J., Sayers, D.E. Materials Research Society	8 国際会議録 Interface Stability of Ti(Si1-yGey)2 and Si1-xGex Alloys Aldrich, D. B., d'Heurle, F. M., Sayers, D. E., Nemanich, R. J. MRS - Materials Research Society
3 国際会議録 Thickness Effects in the Reaction of Cobalt With Silicon-Germanium Alloys Boyanov, B. I., Goeller, P. T., Sayers, D. E., Nemanich, R. J. MRS - Materials Research Society	9 国際会議録 PHASE FORMATIONS IN Co/Si, Co/Ge, AND Co/Si1-xGex BY SOLID PHASE REACTIONS Wang, Z., Chen, Y. L., Ying, H., Nemanich, R. J., Sayers, D. E. MRS - Materials Research Society
4 国際会議録 TITANIUM GERMANOSILICIDE: PHASE FORMATION, SEGREGATION, AND MORPHOLOGY Aldrich, D. B., Chen, Y. L., Sayers, D. E., Nemanich, R. J. MRS - Materials Research Society	10 国際会議録 LOW TEMPERATURE HYDROGEN PLASMA CLEANING PROCESSES OF Si(100), Ge(100), AND SixGe1-x(100) Schneider, T.P., Aldrich, D.A., Cho, J., Nemanich, R.J. Materials Research Society
5 国際会議録 INVESTIGATION OF TITANIUM GERMANIDE FORMATION BY RAMAN SCATTERING AND X-RAY ABSORPTION SPECTROSCOPY Aldrich, D. B., Jahncke, C. L., Nemanich, R. J., Sayers, D. E. Materials Research Society	11 国際会議録 LOCAL STRUCTURAL STUDIES OF TiSi2 AND ZrSi2 THIN FILMS ON Si(111) SURFACES Dao, Y., Edwards, A. M., Sayers, D. E., Nemanich, R. J. MRS - Materials Research Society
6 国際会議録 RAMAN SCATTERING STUDY OF INTERFACE REACTIONS OF Co/SiGe Ying, Hong, Wang, Zhihai, Aldrich, D. B., Sayers, D. E., Nemanich, R. J. MRS - Materials Research Society	12 国際会議録 *RAMAN SPECTROCOPY FOR SEMICONDUCTOR THIN FILM ANALYSIS Nemanich, R.J. Materials Research Society

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