Blank Cover Image

A STUDY OF EXTENDED DEFECTS IN SILICON CRYSTALS AFTER EXPOSURE TO A HYDROGEN PLASMA

著者名:
掲載資料名:
Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
280
発行年:
1993
開始ページ:
561
終了ページ:
564
総ページ数:
4
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991750 [1558991751]
言語:
英語
請求記号:
M23500/280
資料種別:
国際会議録

類似資料:

1 国際会議録 A STUDY OF SURFACE AND SUBSURFACE PROPERTIES OF Si(100) AFTER HYDROGEN ION-BEAM EXPOSURE

Liu, H. X., Schneider, T. P., Montgomery, J., Chen, Y. L., Buczkowski, A., Shimura, F., Nemanich, R. J., Maher, D. M., …

MRS - Materials Research Society
7 国際会議録 ELECTRICAL PROPERTIES OF OXIDE-NITRIDE-OXIDE, ONO, HETEROSTRUCTURES FABRICATED BY LOW TEMPERATURE REMOTE PECVD

Ma, Y., Yasuda, T., Chen, Y.L., Lucovsky, G., Maher, D.M.

Materials Research Society
2 国際会議録 REDUCTION OF SURFACE ROUGHENING AND SUBSURFACE DEFECTS IN H-PLASMA CLEANING OF Si (100)

Schneider, T.P., Montgomery, J.S., Ying, H., Barnak, J.P., Chen, Y.L., Maher, D.M., Nemanich, R.J.

Electrochemical Society
8 国際会議録 Microstructure and Magnetic Properties of Hot-Pressed and Hot-Deformed Composite Magnets Produced by Spark Plasma Sintering Method

Y.L. Ma, D.M. Chen, Q. Shen, P.J. Cao

Trans Tech Publications
3 国際会議録 *TRANSPORT AND MICROSTRUCTURE OF MICROCRYSTALLINE SILICON ALLOYS

Lucovsky, G., Wang, C., Williams, M.J., Chen, Y.L., Maher, D.M.

Materials Research Society
9 国際会議録 Study on the Microstructure and Magnetic Domain Struture of the Soft Magentic Alloy 1J50

C.H. Li, D.M. Chen, Y.L. Ma, A.R. Zhou, S. Huang

Trans Tech Publications
4 国際会議録 ELECTRON MICROSCOPY STUDIES OF UNDOPED AND PHOSPHORUS DOPED Si:H AND Si,C:H FILMS

Chen, Y.L., Bentley, J., Wang, C., Lucovsky, G., Maher, D.M.

Materials Research Society
10 国際会議録 Improvement of III-N Surfaces after Inductively Coupled Plasma Dry Etch Exposure

Keogh, D.M., Dupuis, R.D., Feng, M., Raychaudhuri, S., Asbeck, P.M.

Electrochemical Society
5 国際会議録 *EXTENDED DEFECTS IN AMORPHIZED AND RAPID THERMALLY ANNEALED SILICON

Maher, D.M., Knoell, R.V., Ellington, M.B., Hull, R., Jacobson, D.C., Joy, D.C.

Materials Research Society
11 国際会議録 Thermal Evolution of Hydrogen Related Defects in Silicon Investigated by u-Raman Spectroscopy

Ma, Y., Huang, Y.L., Job, R., Fahrner, W.R., Beaufort, M.-F., Barbot, J. -F.

Electrochemical Society
6 国際会議録 ELECTRICAL PROPERTIES OF BORON-DOPED μc-Si:H PREPARED BY REACTIVE MAGNETRON SPUTTERING FROM c-Si TARGETS

Turner, W.A., Williams, M.J., Chen, Y.L., Maher, D.M., Lucovsky, G.

Materials Research Society
12 国際会議録 Modeling of Extended Defects in Silicon

Law, M. E., Jones, K. S., Earles, S. K., Lilak, A. D., Xu, J-W.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12