ION BEAM SYNTHESIS OF BURIED CoSi2 LAYERS IN SiGe ALLOYS

ION BEAM SYNTHESIS OF BURIED CoSi2 LAYERS IN SiGe ALLOYS

著者名:

Jebasinski, R.

掲載資料名:

Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.

シリーズ名:

Materials Research Society symposium proceedings

シリーズ巻号:

279

発行年:

1993

開始ページ:

875

終了ページ:

880

総ページ数:

6

出版情報:

Pittsburgh, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558991743 [1558991743]

言語:

英語

請求記号:

M23500/279

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00015763
シリーズID:	PA00000011
会議名:	Symposium on beam-solid interactions
回次:	1992
会議開催地:	Boston, MA, USA
会議開催年:	1992.11.30-1992.12.04

類似資料:

1 国際会議録 CoSi2 PRECIPITATE COARSENING DURING FORMATION OF BURIED EPITAXIAL CoSi2 LAYERS BY ION BEAM SYNTHESIS Jebasinski, R., Mantl, S., Radermacher, K., Fichtner, P., Jager, W., Buchal, Ch. Materials Research Society	7 国際会議録 INTERDIFFUSION OFMBE-GROWN SYMMETRICALLY AND ASYMMETRICALLY STRAINED Si/Si1-XGeX SUPERLLATICES INVESTIGATED BY ION SCATTERING Hollander, B., Butz, R., Mantl, S. Materials Research Society
2 国際会議録 THICKNESS DEPENDENCE OF ELECTRICAL TRANSPORT IN BURIED CoSi2 FILMS FABRICATED BY ION BEAM SYNTHESIS Radermacher, K., Jebasinski, R., Mantl, S., Monroe, D., White, A. E., Short, K. T. MRS - Materials Research Society	8 国際会議録 STRUCTURAL PHASE TRANSITION IN BURIED CoSi2 LAYERS Spanninga, W.G., Sandy, A.R., Niesen, L. Materials Research Society
3 国際会議録 Ion Beam Synthesis of Buried Ion Disilicide Radermacher K., Mantl S., Apetz R., Dieker C., Luth H. Kluwer Academic Publishers	9 国際会議録 ION BEAM SYNTHESIS OF BURIED CoxNi1-xSi2 LAYERS IN SILICON Wu, M. F., Wachter, J. De, Bavel, A.-M. Van, Pattyn, H., Langouche, G., Vanhellemont, J., Bender, H., Temst, K., Wuyts, … MRS - Materials Research Society
4 国際会議録 GROWTH OF BURIED CoSi2 LAYERS IN Si(100) BY MOLECULAR BEAM ALLOTAXY Mantl, S., Bay, H. L., Michel, I., Mesters, S., Trinkaus, H. MRS - Materials Research Society	10 国際会議録 ION BEAM SYNTHESIS OF BURIED CoxNi1-xSi2 LAYERS IN SILICON Wu, M. F., Wachter, J. De, Bavel, A.-M. Van, Pattyn, H., Langouche, G., Vanhellemont, J., Bender, H., Temst, K., Wuyts, … MRS - Materials Research Society
5 国際会議録 GROWTH OF ION IMPLANTED BURIED FeSi2 ON Si(111) AND Si(100) Radermacher, K., Mantl, S., Dieker, Ch., Holzbrecher, H., Speier, W., Luth, H. Materials Research Society	11 国際会議録 ION BEAM SYNTHESIS OF BURIED SINGLE CRYSTAL ERBIUM SILICIDE Golanski, A., Feenstra, R., Galloway, M.D., Park, J.L., Pennycook, S.J., Harmon, H.E., White, C.W. Materials Research Society
6 国際会議録 ALLOTAXY: A NEW METHOD FOR EPITAXIAL GROWTH OF COMPOUND THIN FILMS Mantl, S., Bay. H. L., Dieker, Ch. Materials Research Society	12 国際会議録 SMOOTH SILICIDE FORMATION BY ION BEAM MIXING OF Ti/Si-LAYERS Kohlhof, K., Mantl, S., Stritzker, B. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12