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SUBSTRATE AND PARTICLE DEPENDENT DEEP LEVEL GENERATION IN SILICON BY MeV PARTICLE BEAMS

著者名:
Trauwaert, M.-A.
Vanhellemont, J.
Simoen, E.
Claeys, C.
Johlander, B.
Harboe-Sorensen, R.
Adams, L.
Clauws, P.
さらに 3 件
掲載資料名:
Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.
シリーズ名:
Materials Research Society symposium proceedings
シリーズ巻号:
279
発行年:
1993
開始ページ:
93
終了ページ:
98
総ページ数:
6
出版情報:
Pittsburgh, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558991743 [1558991743]
言語:
英語
請求記号:
M23500/279
資料種別:
国際会議録

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