PLANARIZED COPPER INTERCONNECTS BY SELECTIVE ELECTROLESS PLATING
- 著者名:
Kiang, M.H. Tao, J. Namgoong, W. Hu, C. Lieberman, M. Cheung, N. W. Kang, H.-K. Wong, S. S. - 掲載資料名:
- Materials reliability in microelectronics II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A.
- シリーズ名:
- Materials Research Society symposium proceedings
- シリーズ巻号:
- 265
- 発行年:
- 1992
- 開始ページ:
- 187
- 終了ページ:
- 198
- 総ページ数:
- 12
- 出版情報:
- Pittsburgh, PA: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558991606 [1558991603]
- 言語:
- 英語
- 請求記号:
- M23500/265
- 資料種別:
- 国際会議録
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